. in s - de t ] 1 J ul 2 00 8 A Sensor with Analog and Digital Pixels in 0 . 15 μ m SOI Technology

نویسندگان

  • Marco Battaglia
  • Dario Bisello
  • Devis Contarato
  • Peter Denes
  • Piero Giubilato
  • Lindsay E. Glesener
  • Serena Mattiazzo
  • Chinh Vu
چکیده

A monolithic pixel sensor in deep-submicron SiliconOn-Insulator (SOI) CMOS technology has been designed, manufactured and characterised. This technology is of significant interest for applications in particle tracking and imaging. The prototype chip features pixels of 10 μm pitch arrayed in two analog sections and one digital section with a comparator and a latch integrated in each pixel. The prototype response has been tested with infrared lasers and with the 1.35 GeV electron beam extracted from the injection booster at the LBNL Advanced Light Source. Results from irradiation tests with low energy protons and neutrons performed at the LBNL 88-inch Cyclotron are also presented.

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تاریخ انتشار 2008